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Sputtering
Coating Line |
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Applications:
Deposit simple metal substance,
alloy and metallic compound film on
on large sized flat glass sheet, ceramics,
metal or plastics (PC, Resin, PET,
Acrylic, etc.)
Coated glass can have the properties
of sunshine control, temperature preservation,
energy saving and decoration
Features:
Electronic pulse is applied between
workpiece and chamber for very even
deposition of the particles. Deposition
speed is accelerated and the ion energy
is improved.
New flat and column magnetron sputtering
targeting technology, enhance the
coating effect and efficiency
Configured with high accuracy sputtering
power supply, air flow and speed control,
high degree of automation, easy operation
and stable performance
uniform film deposition, high bonding
force, high hardness, corrosion resistance
different colors of films coating
possible
traditional vertical chamber and
high efficient horizontal chamber
available for requirements
Multiple sputtering source
installation possible
The vertical type can coat
both sides simultaneously, while
the horizontal type can coat relatively
smaller work piece
Some advantages of sputtering over
some other coating processes are:
low heat, better film adhesion and
corrosion resistance, denser film
quality, uniform film coatings over
non-flat surfaces and 3-D substrates,
and low material costs
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Main
Technical Data
Sputtering
Line Horizontal Type:
| Model No. |
SHL-600 |
SHL-800 |
SHL-1300 |
SHL-2500 |
SHL-3300 |
SHL-3600 |
| Workpiece Size |
0.4x0.6m |
1x0.8m |
2.4x1.9m |
2.44x1.65m |
3.3x2.24m |
3.66x2.24m |
| Ultimate Pressure |
¡Ü 3x10-3
Pa |
| Sputtering Power |
20KW x 6 |
10KW x 3 |
20KW x 6 |
100KW x 2 |
100KW x 2 |
100KW x 3 |
| Ionization Plate
Power |
3 KW |
3 KW |
3 KW |
¡¡ |
¡¡ |
¡¡ |
Workpiece
Moving Speed
(Meter per Minute) |
0.5 to 4 |
0.5 to 6 |
0.5 to 4 |
0.5 to 4 |
0.5 to 4 |
0.5 to 6 |
| Total Power |
98 KW |
160 KW |
235 KW |
197 KW |
280 KW |
480 KW |
| Floor Area (LxW) |
10 x 6 M |
10 x 6 M |
25 x 7 M |
10 x 11 M |
25 x 13 M |
45 x 13 M |
Sputtering
Line Vertical Type:
| Model No. |
SVL-600 |
SVL-800 |
SVL-1220 |
SVL-1800 |
SVL-2000 |
SVL-2200 |
SVL-2500 |
| Workpiece Size |
0.6x0.6m |
0.8x1.2m |
1.22x1m |
1.8x1m |
2x1.5m |
2.2x1.68m |
2.5x1.68m |
Production
Volume
(x10000M2
per year) |
9 |
14 |
18 |
27 |
45 |
5 to 8 |
20 to 30 |
| Ultimate Pressure |
¡Ü 5x10-3
Pa |
Pumping
Time
(From 1x105 to 2x10-3
Pa) |
¡Ü4.5 min. |
¡Ü4.5 min. |
¡Ü4.5 min. |
¡Ü4.5 min. |
¡Ü4.5 min. |
¡Ü20 min. |
¡Ü20 min. |
| Sputtering Power |
15KW x (2-6) |
20KW x (2-6) |
30KW x (2-6) |
40KW x (2-6) |
50KW x (2-6) |
30KW |
30KW x 2 |
| Heating Power |
¡¡ |
¡¡ |
¡¡ |
¡¡ |
¡¡ |
20 KW |
30 KW |
| Ionization Plate
Power |
3 KW |
3 KW |
3 KW |
5 KW |
5 KW |
¡¡ |
¡¡ |
Workpiece
Moving Speed
(Meter per Minute) |
0.5 to 4 |
0.5 to 4 |
0.5 to 4 |
0.5 to 4 |
0.5 to 4 |
0.5 to 2 |
0.5 to 2 |
| Average
Power |
60 KW |
60 KW |
110 KW |
165 KW |
150 KW |
80 KW |
105 KW |
| Total Power |
100 KW |
100 KW |
180 KW |
270 KW |
250 KW |
98 KW |
170 KW |
| Floor Area (LxW) |
10 x 4 M |
12 x 4 M |
15 x 6 M |
16 x 6 M |
26 x 6 M |
8 x 4 M |
15 x 6 M |
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