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Evaporation
Sputtering Coater |
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Applications:
deposit metal or gold like film
on plastic, ceramic and metal materials
different films, such as high hardness
film, high wear resistance film and
anticorrosion alloy film, can be obtained
by changing the target.
Features:
Both evaporation and sputtering
system are available, you may order
two systems for one chamber.
equipped with advanced column magnetron
sputtering and high efficient resistance
heating evaporating source
combined the magnetron sputtering
and heating evaporating technology
together so the equipment can be used
for a wider range of applications,
obtaining a variety of films of different
properties
unique double door (chamber) system
enabling the loading and coating process
to be proceed at the same time, highly
improve the production efficiency
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Main
Technical Data
Evaporation
Vertical Type:
| Model No. |
EV-1000 |
EV-1500 |
EV-1600 |
EV-1800 |
EV-1800 |
| Chamber Size |
Ø900x750mm |
Ø1000x1200mm |
Ø1200x1500mm |
Ø1400x1750mm |
Ø1600x1800mm |
| Ultimate Pressure |
¡Ü 5x10-3
Pa |
| Pumping Time |
From 1x105
to 2x10-2
Pa¡Ü 10 minutes |
| Max Fixture
Rotating Dia. |
Ø280x600mm
6 axles |
Ø280x1000mm
6 axles |
Ø360x1450mm
6 axles |
Ø420x1600mm
6 axles |
Ø480x1600mm
6 axles |
| Total Power |
40 KW |
72 KW |
101 KW |
92 KW |
101 KW |
| Floor Area (LxW) |
5 x 3 M |
6.8 x 3 M |
8 x 5 M |
8 x 5 M |
6 x 8 M |
Sputtering Vertical
Type:
| Model No. |
SV-500 |
SV-1000 |
SV-1000T |
SV-1100 |
SV-1500 series |
| Chamber Size |
Ø500x700mm |
Ø1000x1200mm |
Ø1000x1200mm |
Ø1100x1600mm |
Ø1100x(1900-2580)mm |
| Ultimate Pressure |
¡Ü 5x10-3
Pa |
| Working Pressure |
5x10-1
to 8x10-2
Pa |
Pumping
Time
From 1x105
to 2x10-2
Pa
(idle load) |
¡Ü 15 minutes |
¡Ü 10 minutes |
¡Ü 15 minutes |
¡Ü 25 minutes |
¡Ü 15 minutes |
| Sputtering
Power |
15 KW |
30 KW |
30 KW |
30 KW |
60 KW |
| Heating
Power |
¡¡ |
¡¡ |
15 KW |
15 KW |
¡¡ |
| Total Power |
25 KW |
45 KW |
95 KW |
80 KW |
154 to 172 KW |
| Floor Area (LxW) |
3 x 1.5 M |
3.5 x 3 M |
3.5 x 2.5 M |
6 x 5 M |
¡Ü 7 x 4 M |
Evaporation Horizontal Type:
| Model No. |
EH-900 |
EH-1000 |
EH-1200 |
EH-1400 |
EH-1600 |
| Chamber Size |
Ø900x750mm |
Ø1000x1200mm |
Ø1200x1500mm |
Ø1400x1750mm |
Ø1600x1800mm |
| Ultimate Pressure |
¡Ü 5x10-3
Pa |
| Pumping Time |
From 1x105
to 2x10-2
¡Ü 10 minutes |
| Max Fixture
Rotating Dia. |
Ø280x600mm
6 axles |
Ø280x1000mm
6 axles |
Ø360x1450mm
6 axles |
Ø420x1600mm
6 axles |
Ø480x1600mm
6 axles |
| Total Power |
23 KW |
30 KW |
70 KW |
103 KW |
78 KW |
| Floor Area (LxW) |
2.2 x 2.1 M |
2.8 x 3 M |
4 x 3 M |
4.5 x 3.2 M |
6 x 4.5 M |
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